CCD Image Sensors in Deep-Ultraviol - E-book

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Ccd Image Sensors In Deep-ultraviolet - ENG

Degradation Behavior And Damage Mechanisms

Flora Li; Arokia Nathan

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Sinopsis

ISBN:	9783540274124
Formato:	Page Fidelity
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Ciencia
Subtema:	Física óptica y luz
Año de publicación:	2006-01-05

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths.

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