Flash Lamp Annealing - E-book

eBook

Flash Lamp Annealing - ENG

From Basics To Applications

Lars Rebohle; Slawomir Prucnal; Denise Reichel

eBook

$2,580.00

Disponible

Información adicional
Sinopsis

ISBN:	9783030232993
Formato:	ePub
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Tecnología e ingeniería
Subtema:	Eletrónica semicondutores
Año de publicación:	2019-07-27

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.

eBooks