MEMS Materials and Processes Handbo - E-book

eBook

Mems Materials And Processes Handbook - ENG

Reza Ghodssi; Pinyen Lin

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$5,780.00

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Sinopsis

ISBN:	9780387473185
Formato:	ePub
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Tecnología e ingeniería
Subtema:	Eletrónica general
Año de publicación:	2011-03-18

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

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