Predictive Simulation of Semiconduc - E-book

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Predictive Simulation Of Semiconductor Processing - ENG

Status And Challenges

Jarek Dabrowski; ?Eicke R. Weber

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Sinopsis

ISBN:	9783662094327
Formato:	Page Fidelity
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Tecnología e ingeniería
Subtema:	Nanotecnología y Sistemas Microelectromecánicos (MEMS)
Año de publicación:	2013-03-09

Predictive Simulation of Semiconductor ProcessingÂ enables researchers and developersÂ to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

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