This book presents a comprehensive overview of security issues in Cyber Physical Systems (CPSs), by analyzing the issues and vulnerabilities in CPSs and examining state of the art security measures. Furthermore, this book proposes various defense strategies including intelligent attack and anomaly detection algorithms. Today technology is continually evolving towards interconnectivity among devices. This interconnectivity phenomenon is often referred to as Internet of Things (IoT). IoT technology is used to enhance the performance of systems in many applications. This integration of physical and cyber components within a system is associated with many benefits; these systems are often referred to as Cyber Physical Systems (CPSs). The CPSs and IoT technologies are used in many industries critical to our daily lives. CPSs have the potential to reduce costs, enhance mobility and independence of patients, and reach the body using minimally invasive techniques. Although this interconnectivity of devices can pave the road for immense advancement in technology and automation, the integration of network components into any system increases its vulnerability to cyber threats. Using internet networks to connect devices together creates access points for adversaries. Considering the critical applications of some of these devices, adversaries have the potential of exploiting sensitive data and interrupting the functionality of critical infrastructure. Practitioners working in system security, cyber security & security and privacy will find this book valuable as a reference. Researchers and scientists concentrating on computer systems, large-scale complex systems, and artificial intelligence will also find this book useful as a reference.