Silicon Semiconductor Technology - E-book

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Silicon Semiconductor Technology - ENG

Processing And Integration Of Microelectronic Devices

Ulrich Hilleringmann

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Sinopsis

ISBN:	9783658410414
Formato:	ePub
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Tecnología e ingeniería
Subtema:	Eletrónica general
Año de publicación:	2023-08-02

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching,Â doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includesÂ modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer view.

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