Temperature Measurement during Mill - E-book

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Temperature Measurement During Millisecond Annealing - ENG

Ripple Pyrometry For Flash Lamp Annealers

Denise Reichel

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Sinopsis

ISBN:	9783658113889
Formato:	Page Fidelity
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Ciencia
Subtema:	Física materia condensada
Año de publicación:	2016-01-07

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

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