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| ISBN: | 9780387765341 |
|---|---|
| Formato: | ePub |
| Idioma: | Inglés |
| Editorial: | Springer Nature |
| Tema: | Tecnología e ingeniería |
| Subtema: | Eletrónica general |
| Año de publicación: | 2009-06-29 |
This book focuses on foundry-based process technology that enables the fabrication of 3-D ICs. The core of the book discusses the technology platform for pre-packaging wafer lever 3-D ICs. However, this book does not include a detailed discussion of 3-D ICs design and 3-D packaging. This is an edited book based on chapters contributed by various experts in the field of wafer-level 3-D ICs process technology. They are from academia, research labs and industry.