Physical Design and Mask Synthesis - E-book

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Physical Design And Mask Synthesis For Directed Self-assembly Lithography - ENG

Seongbo Shim; Youngsoo Shin

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Sinopsis

ISBN:	9783319762944
Formato:	ePub
Idioma:	Inglés
Editorial:	Springer Nature
Tema:	Tecnología e ingeniería
Subtema:	Nanotecnología y Sistemas Microelectromecánicos (MEMS)
Año de publicación:	2018-03-21

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

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